Wafer handling tool and method of use

Details Wafer handling tool and method of use Wafer handling tool and method of use

1988-02-08

1989-04-25

Parker, Roscoe V.

Tools

Miscellaneous

7170, 294 191, 29270, B25B 3300, B25F 100

Patent

active

048236543

ABSTRACT:
An IC-wafer handling tool comprising an aluminum handle, a detachable polyimid pointed end member and a detachable polyimid hook end member. The pointed end is used in cooperation with a vacuum pick to load wafers into susceptor pockets, and the hooked end is used in cooperation with a vacuum pick to unload wafers. During loading and unloading, the only contact with the front side of the wafer is at the edge of the wafer, which does not contain integrated circuit structure, thereby decreasing particulate contamination of the wafer and the associated IC structure on the wafer.

REFERENCES:
patent: 1506102 (1924-08-01), Wise
patent: 4034595 (1977-07-01), Smith
patent: 4496180 (1985-01-01), Hilton
patent: 4658457 (1987-04-01), Rokita

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