Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent
1994-11-03
1996-12-24
Tran, Minhloan
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
257384, 257757, 257770, H01L 2358
Patent
active
055875904
ABSTRACT:
The invention provides a test piece of a thin film shaped material to be inspected for inspecting crystal structure thereof with an X-ray diffraction process. A width of the test piece is smaller than a diameter of a particle of phase transition material having phase-transited, and the test piece of a thin film-shaped material to be inspected is surrounded by an insulator, dielectric or oxide film. The test piece enables inspection of a crystal structure of thin film metal silicide by means of an X-ray diffraction process without lowering a diffraction intensity of the X-rays.
REFERENCES:
"Modeling of agglomeration in polycrystalline thin films: Application to TiSi.sub.2 on a silicon substrate" by Nolen et al., J. Appl. Phys., vol. 71, No. 2, Jan. 15, 1992, pp. 720-724.
"Morphology and phase stability of TiSi.sub.2 on Si" by Jeon et al., J. Appl. Phys. 71, (9), May 1, 1992, pp. 4269-4276.
NEC Corporation
Tran Minhloan
LandOfFree
Test piece for X-ray inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Test piece for X-ray inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test piece for X-ray inspection will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1180323