Abrading – Abrading process – Glass or stone abrading
Patent
1995-12-05
1999-10-05
Morgan, Eileen P.
Abrading
Abrading process
Glass or stone abrading
451 56, 451 59, 451299, 451303, 451307, B24B 2100
Patent
active
059613726
ABSTRACT:
This invention relates to a flexible membrane polishing belt against which a substrate, for example a semiconductor wafer, is polished using chemical mechanical polishing principles. A fluidized layer is provided on a surface of a polishing member backing assembly which urges the moving polishing membrane toward the substrate held in a polishing head to be polished. The linear motion of the belt provides uniform polishing across the full width of the belt and provides the opportunity for a chemical mechanical polishing to take place. Several configurations are disclosed. They include belts which are wider than the substrate being polished, belts which cross the substrate being polished, but which provide relative motion between the substrate and the polishing belt, and polishing belt carriers having localized polishing areas which are smaller than the total area of the substrate to be polished. Only a small area on the surface of the substrate is in contact with polishing membrane but the motion of the carrier with respect to the substrate is programmed to provide uniform polishing of the full substrate surface, as is each configuration described.
REFERENCES:
patent: 3888050 (1975-06-01), Elm
patent: 4676029 (1987-06-01), Palmer
patent: 5016400 (1991-05-01), Weber
patent: 5127196 (1992-07-01), Morimoto et al.
patent: 5484323 (1996-01-01), Smith
patent: 5558568 (1996-09-01), Talieh et al.
patent: 5562524 (1996-10-01), Gill et al.
patent: 5575707 (1996-11-01), Talieh et al.
patent: 5593344 (1997-01-01), Weldon et al.
patent: 5692947 (1997-12-01), Talieh et al.
Applied Materials Inc.
Morgan Eileen P.
LandOfFree
Substrate belt polisher does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Substrate belt polisher, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate belt polisher will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1163705