Light irradiation control method for projection exposure apparat

Details Light irradiation control method for projection exposure apparat Light irradiation control method for projection exposure apparat

1985-10-28

1986-11-25

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 69, 355 77, G03B 2742, G03B 2772

Patent

active

046245510

ABSTRACT:
A control method for the projection optical system of a projection exposure apparatus used in the fabrication of LSIs. The amount of energy incident to the projection optical system during each unit time is maintained constant at all times including each projection and the intervals between the projection operations. This has the effect of cancelling any error in the projected image, particularly any variation of the magnification error with time due to any variation of the optical performance of the projection optical system caused by the illuminating energy.

REFERENCES:
patent: 4105324 (1978-08-01), Seil
patent: 4496239 (1985-01-01), Isohata et al.

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