Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1993-12-02
1995-05-02
Dzierzynski, Paul M.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 2504422, H01J 3726
Patent
active
054122104
ABSTRACT:
A technique for displaying a scanned specimen image permits non-destructive observation of a surface structure having large or precipitous unevenness, an internal structure of a specimen or a specific structure of a defect or foreign matter, which non-destructive observation has hitherto been considered to be difficult to achieve. The technique can be applied to inspection and measurement so as to economically provide devices and parts of high quality and high reliability. Thus, secondary information such as secondary electrons resulting from interaction of primary information with a specimen, the primary information being generated as a result of interaction of a scanning electron beam with the specimen, is utilized as an image signal to form an image.
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Japanese Society of Electron Microscopy, "Basis and Application of an SEM", Dec. 1, 1983. (translation).
Kure Tokuo
Kuroda Katsuhiro
Mizuno Fumio
Ninomiya Ken
Otaka Tadashi
Dzierzynski Paul M.
Hitachi , Ltd.
Nguyen Kiet T.
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