Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1986-04-29

1987-08-18

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

2504421, 250318, H01J 3728, H01J 3720

Patent

active

046879315

ABSTRACT:
Herein disclosed is a scanning electron microscope in which an electron beam is finely focused into a small beam diameter and irradiated on a specimen so that the focused electron beam may scan two-dimensionally to obtain an image with signals of secondary electrons generated from the specimen. The scanning electron microscope is equipped with means for making the moving speed of a specimen stage, which is movable two-dimensionally in response to electric control signals, automatically variable in association with the magnification of the image.

REFERENCES:
patent: 4233510 (1980-11-01), Sato
patent: 4393309 (1983-07-01), Norioka

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