Detector for diffracted electrons

Details Detector for diffracted electrons Detector for diffracted electrons

1994-01-10

1995-02-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, H01J 3728

Patent

active

053877942

ABSTRACT:
A detector for electrons diffracted by a sample irradiated with an electron beam uses a fluorescent screen to output optical signals representing the diffraction pattern formed by the diffracted electrons, and a TV camera to convert these optical signals to electrical signals. A photoelectric converter is used to determine the brightness of each position on the fluorescent screen but its position is controlled such that the converter will not obstruct the view of the fluorescent screen from the TV camera. Coordinate data on the positions at which the measured brightness is greater than a specified standard brightness value may be stored and relied upon in moving the photoelectric converter, or the light-receiving end of an optical fiber connected thereto, relative to the fluorescent screen.

REFERENCES:
patent: 3835246 (1974-09-01), Muller et al.
patent: 4211924 (1980-07-01), Muller et al.
patent: 4514629 (1985-04-01), Smith
patent: 4602282 (1986-07-01), Kurono et al.
patent: 5013915 (1991-05-01), Isakozawa et al.
patent: 5093573 (1992-03-01), Mikoshiba et al.

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