Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1993-10-12

1995-02-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244

Patent

active

053877934

ABSTRACT:
Provided between an optical axis of a primary electron beam directed to a specimen and a secondary electron detector for detecting secondary electrons emitted from the specimen is a shielding electrode which has a transparency for secondary electrons and has a shielding effect for an attracting electric field produced by the secondary electron detector. An opposed electrode is provided at a position facing the shielding electrode with the optical path of the electron beam disposed therebetween. Applied across the shielding electrode and the opposed electrode is a voltage which produces a deflecting electric field along the electron beam path in the vicinity of the secondary electron detector. The deflecting electric field deflects the secondary electrons to the shielding electrode side so that they pass therethrough before they are captured by the secondary electron detector. Optical axis correction coils are provided for generating a magnetic field to correct any bending effect on the trajectory of the primary electron beam by the deflecting electric field.

REFERENCES:
patent: 4442355 (1984-04-01), Tamura et al.
patent: 4714833 (1987-12-01), Rose et al.
Mulvey T. "Scanning Electron Microscopy" Apr. 1974, pp. 43-50, proceedings of the Seventh Annual IIT Research Institute, Chicago, Ill.

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