Method of manufacturing a stamper

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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427123, 427259, 427270, 427272, 427282, 427387, 427404, 205 69, 205156, 205221, 164 2, B44C 122

Patent

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053856384

ABSTRACT:
A method of manufacturing a stamper includes the steps of coating a flat surface of a substrate with photosensitive material; directing light to a specified position on the photosensitive material to expose it; developing the photosensitive material to make a minute photoresist pattern; etching the substrate to a specified depth with a mask of the photoresist pattern; removing the photoresist as the mask to make a glass master; arbitrarily forming a first nickel layer on a surface of the glass master; forming an intermediate layer of a metal having a smaller linear expansion coefficient than nickel over the first nickel layer; forming a second nickel layer on the intermediate layer to form a conductive film having a two- or three-stratum structure; arbitrarily subjecting the whole substrate to a process to make nickel passive; forming an electroformed layer on the conductive film by an electroforming process; and separating the conductive film from the glass master.

REFERENCES:
patent: 4500392 (1985-02-01), Slaten
Weast CRC Handbook of Chemistry and Physics CRC Press Inc, 1982, pp. P-191, E-81.

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