Method of depositing films on semiconductor devices by using car

Details Method of depositing films on semiconductor devices by using car Method of depositing films on semiconductor devices by using car

1996-10-02

2000-01-04

Bowers, Charles

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

438 3, 438240, 438758, 438754, 427226, 427 96, B05D 308

Patent

active

060109696

ABSTRACT:
A method of forming a film on a substrate using chemical vapor deposition techniques and carboxylate complexes. The complexes and method are particularly suitable for the preparation of semiconductor structures.

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