Process for manufacturing calibration structures particularly fo

Details Process for manufacturing calibration structures particularly fo Process for manufacturing calibration structures particularly fo

1993-11-09

1994-07-26

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156626, 156653, 156657, 156662, 437228, 437233, 437 8, 437 41, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

053324706

ABSTRACT:
Process for the manufacture of calibration structures particularly for the calibration of machines for measuring alignment in integrated circuits in general, the peculiarity of which consists in the fact that calibration structures are provided in which the alignment of one layer with respect to another layer is set to a known extent by means of a single masking.

REFERENCES:
patent: 4307179 (1981-12-01), Chang et al.
patent: 4576900 (1986-03-01), Chiang
patent: 4767660 (1988-08-01), Hosoda et al.
patent: 4888450 (1989-12-01), Lando et al.
patent: 5055383 (1991-10-01), Koblinger et al.
patent: 5246539 (1993-09-01), Candestrari

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