Semiconductor memory device and a method for producing the same

Details Semiconductor memory device and a method for producing the same Semiconductor memory device and a method for producing the same

Filed on

1991-07-17

Date issued

1993-01-19

Examiner

James, Andrew J.

Patent Class

Active solid-state devices (e.g., transistors, solid-state diode

SubClass

Field effect device

SubSubClass

Having insulated electrode

Other Related Categories

257302, 257329, H01L 2968, H01L 2910, H01L 2906

Type

Patent

Status

active

Patent number

051810891

Description

ABSTRACT:
A semiconductor memory device is provided which includes a semiconductor substrate of a first conductivity type, a plurality of trench capacitors formed in the substrate and a plurality of switching transistors formed on the respective trench capacitors. Each of the switching transistors is electrically connected to the corresponding trench capacitor. Each of the trench capacitors has a first electrode formed in the side portion of a trench provided in the substrate and a second electrode containing impurities of the first conductivity type and embedded in the trench. Each of the switching transistors has a source region formed from a first epitaxial layer of the first conductivity type grown on the trench so as to electrically contact the second electrode, a channel region formed from a second epitaxial layer of a second conductivity type grown on the first epitaxial layer, and a drain region formed from a third epitaxial layer of the first conductivity type grown on the second epitaxial layer. The first, second and third epitaxial layers are in contact with a polycrystalline silicon layer containing impurities of the second conductivity type. The first conductivity type is opposite to the second conductivity type.

REFERENCES:
patent: 4791463 (1988-12-01), Malhi
patent: 4914739 (1990-04-01), Malhi
patent: 4939104 (1990-07-01), Pollack et al.
patent: 4967247 (1990-10-01), Kaga et al.
patent: 5001526 (1991-03-01), Gotou
patent: 5006909 (1991-04-01), Kosa
patent: 5010386 (1991-04-01), Groover, III

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