Electronic device enclosure including a conductive cap and subst

Details Electronic device enclosure including a conductive cap and subst Electronic device enclosure including a conductive cap and subst

1994-10-27

1996-08-13

Brown, Peter Toby

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

7351436, 257420, 257659, G01P 15125, H01L 2314

Patent

active

055459129

ABSTRACT:
An enclosure (8) for an electronic device (26) such as, for example, an accelerometer. The enclosure (8) includes a conductive semiconductor substrate (12) underlying the electronic device (26), a conductive cap (16) overlying the electronic device (26), and a power supply (25) having one or more outputs (27, 29) each with a substantially fixed potential wherein one output is electrically coupled to the conductive semiconductor substrate (12) and another output to the conductive cap (16). In a preferred embodiment, substrate ( 12 ) and cap (16) are coupled to the same power supply output (27). This coupling substantially eliminates the adverse effects of parasitic capacitances of the substrate (12) and cap (16) to reduce measurement error and EMI when a capacitive accelerometer is used as the electronic device (26).

REFERENCES:
patent: 5089876 (1992-02-01), Ishioka
patent: 5115291 (1992-05-01), Stokes
patent: 5146389 (1992-09-01), Ristic et al.
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5381300 (1995-01-01), Thomas et al.
Ristic et al., "A Capacitive Type Accelerometer with Self-Test Feature Based on a Double-Pinned Polysilicon Structure " 7th International Conference on Solid-State Sensors and Actuators, Transducers 1993, Yokohama, Japan, Jun. 7-10, 1993, Digest of Technical Papers, pp. 810-813.

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