Diamond-like carbon wet etchant stop for formation of magnetic t

Details Diamond-like carbon wet etchant stop for formation of magnetic t Diamond-like carbon wet etchant stop for formation of magnetic t

1995-12-13

1997-10-28

Turner, Archene

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566281, 409131, 427128, 427130, 427131, 427132, 427337, 427343, B44C 122

Patent

active

056814267

ABSTRACT:
A magnetic structure is formed by depositing a layer of diamond-like carbon onto the exposed surface of an a first material and depositing a layer of second material onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the second layer and is patterned in the form of the desire structure. The exposed portions of the second layer are removed with a wet etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed.

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