Scanning capacitance - voltage microscopy

Details Scanning capacitance - voltage microscopy Scanning capacitance - voltage microscopy

1990-03-27

1991-11-12

Wieder, Kenneth A.

Electricity: measuring and testing

Electrostatic field

Using modulation-type electrometer

324662, 324158R, G01R 2912

Patent

active

050651030

ABSTRACT:
An apparatus and method for generating microscopic scan data of C-V and/or dC/dV over a scan area. A scanning microscope, for example a scanning force microscope, is provided with a voltage biased tip, for example, of tungsten, which is scanned across an area to derive the data. The data can be used to derive a plot of semiconductor dopant level across the scan area. Other material properties can be derived, for example, carrier generation and recombination rates and subsurface defects.

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Industrial Apportunities Ltd. Potential Measuring System.

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