Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive...
Patent
1988-05-31
1993-10-05
Loney, Donald J.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
430311, 430312, 430313, 430314, 430317, 430322, 430323, 430324, 430327, 430394, 20415763, 2504922, 2504923, 156628, 156643, 1566591, 437 15, 437 16, 437 20, 437229, G03C 500, H01L 2104
Patent
active
052503887
ABSTRACT:
Processes for producing stable, radiation hard, highly conductive polymers by a combination of chemical doping and ion irradiation and microelectronics are described. The highly conductive polymers formed by these processes may contain regions of different kinds of conductivity on the same polymer. Resist coatings and masks are used in conjunction with chemical doping and ion irradiation to create specific predetermined n and p conductivity patterns and insulation areas on polymeric films of selected thicknesses for electronic circuitry applications. The resulting circuitry, besides having a conductivity approaching that of metal, is extremely light in weight, flexible, and conductively stable. Several different configurations of microelectronic junction devices fabricated from single type or multiple type conductivity polymer films used either alone or with a polymer of opposite conductivity and a suitable metal or metals are disclosed.
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Bartko John
Hanes Maurice H.
Ruddy Francis H.
Schoch, Jr. Karl F.
Loney Donald J.
Lynch M. P.
Westinghouse Electric Corp.
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