Zoom system, in particular, a zoom system for an...

Details Zoom system, in particular, a zoom system for an... Zoom system, in particular, a zoom system for an...

2005-05-31

2005-05-31

Epps, Georgia (Department: 2873)

Optical: systems and elements

Lens

With variable magnification

C359S432000

Reexamination Certificate

active

06900946

ABSTRACT:
A zoom system that is particularly suited to use on an illumination device of a microlithographic projection exposure system and is configured in the form of a focal-length-zooming lens. The lenses of the zoom system define an object plane (6) and an image plane (8) that is a Fourier transform of the object plane. Both an intermediate pupillary plane (25) that is conjugate to the image plane and an intermediate field plane (27) that is a Fourier transform of the image plane lie between the object plane (6) and image plane (8). At least one movable lens (31, 32) is arranged in the vicinity of these intermediate image planes (25, 27). The system is characterized by a large expansion of the illuminated area on the image plane for short lengths of travel and light weights of these movable lenses (31, 32).

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