Zoom system for an illumination device

Details Zoom system for an illumination device Zoom system for an illumination device

2005-03-08

2005-03-08

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

06864960

ABSTRACT:
A zoom system for an illumination device of a microlithographic projection exposure system is configured in the form of a focal-length zoom lens. The lenses of the zoom system define an object plane (6) and an image plane (8) that is a Fourier transform of the object plane. The zoom system is characterized by a large expansion of the illuminated area in the image plane, where expansion factors (D) in excess of four are feasible and are obtained by employing lens groups (33, 36) that are movable over large moving ranges.

REFERENCES:
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori
patent: 5379090 (1995-01-01), Shiraishi
patent: 5675401 (1997-10-01), Wangler et al.
patent: 5955243 (1999-09-01), Tanitsu
patent: 6075653 (2000-06-01), Narimatsu et al.
patent: 6249335 (2001-06-01), Shiraishi et al.
patent: 6285443 (2001-09-01), Wangler et al.
patent: 6307682 (2001-10-01), Hoffman et al.
patent: 6563567 (2003-05-01), Komatsuda et al.
patent: 20010001247 (2001-05-01), Finders et al.
patent: 44 21 053 (1995-12-01), None
patent: 0 576 297 (1993-12-01), None
patent: 0 687 956 (1995-12-01), None
patent: 0 747 772 (1996-12-01), None
patent: 1 014 196 (2000-06-01), None
patent: 1 211 561 (2002-06-01), None
patent: 1 235 113 (2002-08-01), None
patent: 2001-135560 (2001-05-01), None
patent: WO 0161411 (2001-08-01), None

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