Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2006-12-26
2006-12-26
Coleman, W. David (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C438S018000
Reexamination Certificate
active
07154115
ABSTRACT:
A test vehicle (100) comprises a substrate (99), a plurality of nested serpentine lines (202) on the substrate, and a plurality of test pads (204) on the substrate. Each serpentine line has a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment. Each of the plurality of test pads is connected to a respective turn section of a respective one of the nested serpentine lines. Each pair of test pads connected to one of the subset of the nested serpentine lines has at least a respectively different turn section portion connected therebetween.
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Integrated Circuit Yield Management and Yield Analysis: Development and Implementation; Charles H. Stapper et al.; IEEE Transactions on Semiconductor Manufacturing; vol. 8, No. 2, May 1995; pp. 95-102.
Extraction of Defect Size Distributions in an IC Layer Using Test Structure Data; Jitendra B. Khare et al.; IEEE Transactions on Semiconductor Manufacturing, vol. 7, No. 3, Aug. 1994; pp. 354-368.
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Ciplickas Dennis J.
Hess Christopher
Stine Brian E.
Weiland Larg H.
Coleman W. David
Duane Morris LLP
Koffs Steven E.
PDF Solutions, Inc.
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