Zone-melting recrystallization process

Details Zone-melting recrystallization process Zone-melting recrystallization process

1987-11-13

1989-12-05

Doll, John

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156603, 1566207, C30B 1300

Patent

active

048850527

ABSTRACT:
An improved method of zone-melting and recrystallizing of polysilicon film on an insulator over silicon is described.

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Geis et al., "Solidification-Front Modulation to Entrain Subboundaries in Zone-melting Recrystallization of Si on SiO.sub.2 ", J. Electrochem. Soc. vol. 130, No. 5 (1983) pp. 1178-1183.
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