Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-10-18
1991-06-04
Garvin, Patrick P.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
1566207, 15662072, 156DIG64, 156DIG73, 156DIG80, C30B 1300
Patent
active
050211196
ABSTRACT:
A method for reducing defects after zone melting and recrystallization of semiconductor films formed on an insulator over a semiconductor substrate by selectively removing portion of a first layer over the semiconductor film, amorphizing the exposed film portion and laterally regrowing the amorphized region.
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Allen Lisa P.
Fan John C.C.
Narayan Jagdish
Vu Duy-Phach
Zavracky Paul M.
Breneman R. Bruce
Garvin Patrick P.
Kopin Corporation
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