Zone-melt recrystallization method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

15662071, 1566207, 15662076, 156DIG64, 422245, 422248, 422109, C30B 1330, C30B 1332

Patent

active

050749528

ABSTRACT:
The improved zone-melt recrystallization apparatus is comprised of a heating element having a plurality of individually controllable heating elements. The elements are heated in sequence to generate a melted zone within a semiconductor material which is translated across the material by heating then cooling adjacent heating elements to recrystallize the material.

REFERENCES:
patent: 2719799 (1955-10-01), Christian
patent: 2852351 (1958-09-01), Pfann
patent: 3198929 (1965-08-01), Stut
patent: 3433627 (1969-03-01), Liang et al.
patent: 3546027 (1970-12-01), Harle et al.
patent: 3984280 (1976-09-01), Besselere et al.
patent: 4068814 (1978-01-01), Anthony et al.
patent: 4086424 (1978-04-01), Mellen, Sr.
patent: 4135027 (1979-01-01), Anthony et al.
patent: 4196042 (1980-04-01), Reynolds
patent: 4371421 (1983-02-01), Fan et al.
patent: 4479846 (1984-10-01), Smith et al.
patent: 4578143 (1986-03-01), Arai
patent: 4694143 (1987-09-01), Nishimura et al.
"Zone Melting Recrystallization of Silicon Film wth a Moveable Strip Heater Oven" by Geis et al., J. Electrochem. Soc. Solid State Science and Technology, vol. 129, p. 2813, 1982.
Laser and Electron-Beam Interactions with Solids, "Transient Heating with Graphite Heaters for Semiconductor Processing", by Fan et al., 1982, pp. 751-758.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Zone-melt recrystallization method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Zone-melt recrystallization method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Zone-melt recrystallization method and apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-41329

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.