Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1994-01-13
1995-07-11
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310313A, H01L 4108
Patent
active
054323975
ABSTRACT:
Disclosed herein is a zinc oxide piezoelectric crystal film which is grown on an R-plane sapphire substrate to orient its c-axis in parallel with the substrate surface. In order to improve orientation of the zinc oxide piezoelectric crystal film used is a Zn target for forming the zinc oxide piezoelectric crystal film by sputtering contains not more than 5 percent by weight of nickel or not more than 4.5 percent by weight of iron with respect to Zn.
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2.2 GHz SAW Filters Using ZnO/Al.sub.2 O.sub.3 Structure; Tsuneo Mitsuyu, Shusuke Ono and Kiyotaka Wasa (Proceedings of 1st Symposium on Ultrasonic Electronics, Tokyo, 1980 Japanese Journal of Applied Physics, vol. 20 (1981) Supplement 20-3, pp. 99-102).
Control of Preferred Orientation for ZnO.sub.x Films: Control of Self-Texture; Norifumi Fujimura, Tokihiro Nishihara, Seiki Goto, Jifang Xu and Tiachiro Ito (Journal of Crystal Growth; 130 (1993) 269-279; North Holland).
Ieki Hideharu
Koike Jun
Dougherty Thomas M.
Murata Manufacturing Co. Ltd.
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