Zinc-based microfuse

Details Zinc-based microfuse Zinc-based microfuse

1991-04-10

1992-04-07

Tufariello, T. M.

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating selected area

205183, C25D 502

Patent

active

051025060

ABSTRACT:
A zinc-based temporary electrical connection (e.g., a microfuse) useful in electroplating isolated conductor (i.e., copper) structures and copper/polyimide high-density interconnect structures are disclosed. The microfuse includes a zinc conductor layer, and in some embodiments, additional silicon adhesion and silicon protection layers. The microfuse is conductive, and therefore useful in an electroplating process, until it is treated (e.g., heated to about 400.degree. C. for one hour), to convert it into an insulator due to zinc oxidation, and remains in this state.

REFERENCES:
patent: 3169892 (1965-02-01), Lemelson
patent: 3261082 (1966-07-01), Maissel et al.
patent: 3404032 (1968-10-01), Collins
patent: 3457636 (1969-07-01), Ireland et al.
patent: 3634202 (1972-01-01), Michelet
patent: 4617723 (1986-10-01), Mukai
patent: 4661214 (1987-04-01), Young
patent: 4670970 (1987-06-01), Bajor

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