Zig-zag V-MOS transistor structure

Details Zig-zag V-MOS transistor structure Zig-zag V-MOS transistor structure

1980-07-18

1984-03-20

Larkins, William D.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29571, 29580, 156647, 156662, 357 55, 357 60, 357 68, H01L 21302, H01L 2904, H01L 2978

Patent

active

044384483

ABSTRACT:
A zig-zag V-groove configuration for use in V-MOS transistors is disclosed. Instead of merely forming parallel rows of V-grooves, a zig-zag configuration is used, utilizing two different directions for the V-grooves, at least one of which is not the conventional <011> direction. This configuration can be used with either the ladder or interdigitated configuration for the source contact and gate metals.

REFERENCES:
patent: 3354007 (1967-11-01), Michelitsch
patent: 3414781 (1968-12-01), Dill
patent: 3793712 (1974-02-01), Bean et al.
patent: 3813585 (1974-05-01), Tarui et al.
patent: 3986200 (1976-10-01), Allison
patent: 4017885 (1977-04-01), Kendall et al.
patent: 4029531 (1977-06-01), Marinelli
patent: 4070690 (1978-01-01), Wickstrom
patent: 4145703 (1979-03-01), Blanchard et al.
patent: 4172005 (1979-10-01), Maraoka et al.

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