Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1992-08-25
1994-03-15
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430313, 430318, 430394, 1566591, 1566611, G03C 500
Patent
active
052945200
ABSTRACT:
A process in the fabrication of wiring patterns on ceramic or polymeric substrates precisely controls the cross-sectional dimensions of the metallization that constitute the wiring patterns. A single etch process defines thin film conductors on a substrate without loss to the conductor cross-section and provides enhanced thin film design flexibility. The zero undercut etch process uses photoresists defining the metal patterns to completely protect the metal patterns during the subetch.
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DeMercurio Thomas A.
Hetherington Richard J.
Meyen Robert A.
Sands Scott A.
Duda Kathleen
International Business Machines - Corporation
McCamish Marion E.
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