Yttria-coated ceramic components of semiconductor material...

Details Yttria-coated ceramic components of semiconductor material... Yttria-coated ceramic components of semiconductor material...

2007-05-22

2007-05-22

McNeil, Jennifer (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S702000, C428S698000, C118S7230AN, C438S706000, C438S798000

Reexamination Certificate

active

10737917

ABSTRACT:
Yttria-coated ceramic components of semiconductor material processing apparatuses include a substrate and at least one yttria-containing coating on the substrate. The components are made by applying a first yttria-containing coating on a ceramic substrate, which can be a green body of the ceramic material. The coated green body is sintered. The first yttria-containing coating can be treated to remove attached yttria particles resulting from the sintering. In another embodiment, a second yttria-containing coating can be thermally sprayed on the first yttria-containing coating to cover the particles.

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Co-pending U.S. Appl. No. 09/607,922, filed Jun. 30, 2000.
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Co-pending U.S. Appl. No. 10/180,504, filed Jun. 27, 2002.
Written Opinion dated Jun. 20, 2006 for PCT US04/41206.

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