Yokeless hidden hinge digital micromirror device

Details Yokeless hidden hinge digital micromirror device Yokeless hidden hinge digital micromirror device

2006-03-14

2006-03-14

Perkey, W. B. (Department: 2851)

Optics: image projectors

Reflector

Plural

C359S291000, C359S295000, C359S846000, C347S239000

Reexamination Certificate

active

07011415

ABSTRACT:
A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.

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