Yield prediction feedback for controlling an equipment...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S121000

Reexamination Certificate

active

07974723

ABSTRACT:
A yield prediction is received by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product. A weighting of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. A cost-benefit analysis is computed that identifies a cost and a benefit of manufacturing future products on the manufacturing tool. A determination is made regarding whether to process a future product on the manufacturing tool based on the cost-benefit analysis.

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