Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1987-06-24
1988-11-22
Lacey, David L.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156662, 156668, 20419237, C03C 1500
Patent
active
047863595
ABSTRACT:
A plasma etch process and apparatus is disclosed in which a gas mixture comprises CF.sub.3 Br, xenon or krypton, and oxygen. The plasma reactor includes a sacrificial element, preferably in the form of a graphite ring, on the lower electrode of a parallel plate reactor.
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patent: 4592801 (1986-06-01), Hara et al.
patent: 4615764 (1986-10-01), Bobbio et al.
Lachenbruch Roger B.
Nakajima Shu
Stark Mark M.
Johnson Lori A.
Lacey David L.
Tegal Corporation
Wille Paul F.
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