X-Y Work table

Details X-Y Work table X-Y Work table

1979-04-30

1981-07-21

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250442, H01J 3726

Patent

active

042800544

ABSTRACT:
Apparatus comprising a work table movable along orthogonal axes, and optical means, including orthogonal mirrors movable with the table, for sensing the positions of the table along the axes, featuring an improvement wherein the table comprises a solid block of metal, means are provided to secure a workpiece to move with the block, and two orthogonal external surfaces of the block are polished to provide the mirrors.

REFERENCES:
patent: 3307035 (1967-02-01), Grasenick et al.
patent: 3597091 (1971-08-01), Bowker
patent: 3738754 (1973-06-01), Marcy et al.
patent: 4063103 (1977-12-01), Sumi
"Digitally Positioned Mechanical Stage", J. Vacuum Sci. & Tech., Pasiecznick et al., vol. 15, May 1978, pp. 909-912.

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