X-Y stage system with onboard linear motor

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Details

C355S053000, C355S072000

Reexamination Certificate

active

06911747

ABSTRACT:
An X-Y stage system is disclosed which is easy to assemble and compact or slim in construction. Both the X- and Y-stages are allowed to move without getting influence from the magnetic force created by the field magnets. The X-Y stage system has an X-stage movable relatively to a bed through a linear motion guide unit in an X-direction, and a Y-stage movable relatively to the X-stage through another linear motion guide unit in a Y-direction. The linear motors to force the X- and Y-stages are composed of paired field magnets of secondary side held to the bed and the Y-stage, respectively, and armature windings of primary side supported on the opposite sides of the X-stage in a way lying in clearances between the opposing field magnets.

REFERENCES:
patent: 4808892 (1989-02-01), Dreibelbis
patent: 5962937 (1999-10-01), Wavre
patent: 2004/0061383 (2004-01-01), Tsuboi et al.
patent: 9-266660 (1997-10-01), None
patent: 2000-333435 (2000-11-01), None
patent: 2004-72960 (2004-03-01), None

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