X-Y stage and charged particle beam exposure apparatus

Details X-Y stage and charged particle beam exposure apparatus X-Y stage and charged particle beam exposure apparatus

1995-07-25

1996-10-01

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

33 1M, H01J 3720

Patent

active

055612997

ABSTRACT:
An X-Y stage includes a base having a first guide rail extending in a first direction, a stage having a second guide rail extending in a second direction perpendicular to the first direction, where the stage is movable with respect to the base in mutually perpendicular directions X and Y, and a slider arranged between the base and the stage and having a plurality of first wheels provided with respect to the first guide rail and rotatable under guidance of the first guide rail and a plurality of second wheels provided with respect to the second guide rail and rotatable under guidance of the second guide rail. The first wheels block a movement of the slider in the second direction by engaging the first guide rail when the stage moves in the second direction, and the second wheels block a movement of the slider in the first direction by engaging the second guide rail when the stage moves in the first direction. In addition, the slider is arranged in at least three locations.

REFERENCES:
patent: 4372223 (1983-02-01), Iwatani
patent: 5214290 (1993-05-01), Sakai

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