Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1979-05-24
1981-07-21
Dixon, Harold A.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250272, 250399, G01M 2300
Patent
active
042800498
ABSTRACT:
An X-ray spectrometer which is arranged inside an evacuatable housing and which comprises a wavelength dependent X-ray detection system and, for irradiating the specimen to be examined, an electron source with an electron deflection system for generating an electron beam and an X-ray source for generating an X-ray beam. The X-ray source consists of an anticathode on which the electron beam can be directed by the electron deflection system in order to generate the X-ray beam.
Knippenberg Wilhelmus F.
Werner Helmut W. W.
Witmer Antonius W.
Briody Thomas A.
Dixon Harold A.
Mayer Robert T.
Miller Paul R.
U.S. Philips Corporation
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