X-ray microscope having an X-ray source for soft X-ray

Details X-ray microscope having an X-ray source for soft X-ray X-ray microscope having an X-ray source for soft X-ray

2007-02-06

2007-02-06

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Telescope or microscope

C378S143000

Reexamination Certificate

active

09741672

ABSTRACT:
Soft X-rays are very suitable for the examination of biological samples by means of an X-ray microscope. The X-rays are generated by focusing an electron beam onto a fluid jet, thus producing a very small electron focus on the jet and hence a very small monochromatic X-ray spot. The electron spot can be obtained by means of a standard electron microscope (a SEM) or by means of a standard electron gun for a cathode ray tube (a CRT gun). The imaging optical elements in the X-ray microscope may be Fresnel zone plates.

REFERENCES:
patent: 4723262 (1988-02-01), Noda et al.
patent: 4953191 (1990-08-01), Smither et al.
patent: 5044001 (1991-08-01), Wang
patent: 5835262 (1998-11-01), Iketaki et al.
patent: 6002744 (1999-12-01), Hertz et al.
patent: W09740650 (1997-10-01), None
Berglund et al., “Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation”, published in Rev. Sci. Instrum., vol. 69, p. 2361, 1998.

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