X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Patent
1990-10-16
1992-07-21
Church, Craig E.
X-ray or gamma ray systems or devices
Specific application
Telescope or microscope
378210, G21K 700
Patent
active
051329948
ABSTRACT:
An X-ray microscope is provided with an X-ray source, a converging optical system collecting radiation emitted from the X-ray source, a stage on which an object is placed, and a detector having sensitivity with respect to radiation of wavelengths ranging from an X-ray region to a vacuum ultraviolet ray region, in which a filter eliminating long wavelength components from the radiation emitted from the X-ray source is disposed in an optical path from the X-ray source to the detector. Whereby, the X-ray microscope has important advantages in practical use that radiation of a desired wavelength region can be sensitively detected from the X-ray source, without bringing about large size and high cost of the optical instrument even where the X-ray source is used as a radiation source for white light.
REFERENCES:
patent: 2759106 (1956-08-01), Walter
"Soft X-ray Imaging With a Normal Incidence Mirror", Underwood, Nature vol. 294-3 Dec. 1981 pp. 429-430.
Schmahl, et al., "X-Ray Microscopy", Springer Series in Optical Sciences, vol. 43, (Springer-Verlag) 1983.
Aoki, Applied Physics, vol. 56, No. 3, 1987, pp. 342-351.
Fraser, "The Soft X-Ray Quantum Detection Efficiency of Microchannel Plates", Nuclear Instruments and Methods 195, 1982, pp. 523-538.
Martin, et al., "Quantum efficiency of opaque Csl photocathodes with channel electron multiplier arrays in the extreme and far ultraviolet", Applied Optics, vol. 21, No. 23, Dec. 1982, pp. 4206-4207.
Henke, et al., "Low-Energy X-Ray Interaction Coefficients: Photoabsorption, Scattering, and Reflection", Atomic Data and Nuclear Data Tables 27 1-144, 1982.
Church Craig E.
Olympus Optical Co,. Ltd.
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