X-ray mask support member, X-ray mask, and X-ray exposure proces

Details X-ray mask support member, X-ray mask, and X-ray exposure proces X-ray mask support member, X-ray mask, and X-ray exposure proces

1988-12-27

1991-04-30

Fields, Carolyn E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378 34, 2504922, G21K 500

Patent

active

050125001

ABSTRACT:
An X-ray mask support member comprises a support frame, and a support membrane which is held thereon and comprises X-ray-transmissive membranes laminated in multiple layers. The support membrane comprises and holds between the multi-layers at least one layer of a transmissive membrane T having an electrical resistivity of 1.times.10.sup.-4 .OMEGA..multidot.cm or less.

REFERENCES:
patent: 3974392 (1976-08-01), Bernacki
patent: 4637684 (1987-01-01), Tomita et al.
patent: 4677042 (1987-06-01), Kato et al.
patent: 4707059 (1987-11-01), Ogura et al.
Inorganic and Theoretical Chemistry, vol. VIII, J. W. Mellor, p. 114, Kagaku to Kogyo (Chemistry and Chemical Industry), vol. 37, No. 9 (1984).

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