X-ray mask ring and apparatus for making same

Details X-ray mask ring and apparatus for making same X-ray mask ring and apparatus for making same

1984-01-06

1986-09-02

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

269309, 350318, 2504911, G21K 500

Patent

active

046100202

ABSTRACT:
The present invention is directed to a new and improved X-ray mask ring assembly and apparatus for making same which includes a mask ring, a plurality of kinematic mounts for removably mounting the mask on an alignment cartridge, each of the kinematic mounts including an insert member having a funnel-like shaped seat for receiving a mating ball-like shaped member mounted on the alignment cartridge, and an adhesive for mounting the insert member on the mask ring. An apparatus for making the mask ring assembly includes a fixture having an upper portion and a lower portion, which are adapted to be coupled together in close alignment one with respect to the other, a ball-like shaped member fixedly mounted on the lower portion, a mask ring having an opening for receiving an insert and said insert having a funnel-like shaped seat, the mask ring being mounted in the fixture so that the ball-like shaped member engages the seat, said mask ring being aligned with the fixture and held with respect thereto, and adhesive being applied to fixedly attach the insert member to the mask ring in its aligned position with respect thereto.

REFERENCES:
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patent: 4390172 (1983-06-01), Gotman
patent: 4534047 (1985-08-01), Deschenaux et al.
patent: 4539695 (1985-09-01), La Fiandra

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