X-Ray lithography source tube

Details X-Ray lithography source tube X-Ray lithography source tube

1981-11-27

1984-10-16

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

378141, 378143, G21K 500

Patent

active

044779216

ABSTRACT:
A composite target cone for use in an X-ray lithography source tube. The composite target cone is multi-layered, having at least an X-ray generating layer formed of platinum, silver, palladium, rhodium, molybdenum, tungsten, silicon, aluminum or copper, and a water-interface layer. The water-interface layer includes a layer of high thermal conductivity material, covered at one side by a layer of high corrosion resistance material and at the other side by a layer of high-melting point material.

REFERENCES:
patent: 3742229 (1973-06-01), Smith et al.
patent: 3742230 (1973-06-01), Speers et al.
patent: 3743842 (1973-07-01), Smith et al.
patent: 3974382 (1976-08-01), Bernacki
patent: 3984680 (1976-10-01), Smith
patent: 4201580 (1980-05-01), Feit
patent: 4215192 (1980-07-01), Buckley
patent: 4238706 (1980-12-01), Yoshihara
patent: 4258262 (1981-03-01), Maldonado
patent: 4262083 (1981-04-01), Pampaloue et al.
J. L. Gaines et al., "An Improved Annular Shaped Electron Gun for an X-Ray Generator", Nuclear Instruments and Methods, 126 (1975), pp. 99-101.
J. R. Maldonado, "X-Ray Lithography Source Using a Stationary Solid Pd Target", J. Vac. Sci. Tech., 16(6), Nov./Dec. 1979, pp. 1942-1945.

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