Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1976-04-06
1977-07-12
Welsh, John D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 44, 427160, 96 27E, 96 35, B05D 306
Patent
active
040355225
ABSTRACT:
An X-ray mask for variable resist exposure for use with X-ray lithography so that multi-level devices, using a single exposure of X-rays, can be made.
REFERENCES:
patent: 3462762 (1969-08-01), Kaspaul et al.
patent: 3607382 (1971-09-01), Henker
patent: 3743842 (1973-07-01), Smith et al.
International Business Machines - Corporation
Jones II Graham S.
Welsh John D.
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