X-ray illumination optical system and X-ray reduction...

Details X-ray illumination optical system and X-ray reduction... X-ray illumination optical system and X-ray reduction...

2006-11-07

2006-11-07

Thomas, Courtney (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Lithography

Reexamination Certificate

active

07133489

ABSTRACT:
An illumination optical system illuminates a surface to be illuminated. The illumination optical system includes a mirror having a surface effective to shape X-rays from a source into X-rays having an arcuate sectional shape, and an optical system for illuminating the surface to be illuminated, with the X-rays having an arcuate sectional shape from the mirror and in an oblique direction with respect to that surface.

REFERENCES:
patent: 5375157 (1994-12-01), Maehara
patent: 5677939 (1997-10-01), Oshino
patent: 6504896 (2003-01-01), Miyake et al.
patent: 06177014 (1994-06-01), None
patent: 07235470 (1995-09-01), None
patent: 08148415 (1996-06-01), None
Southall, James, P. C.,Mirrors, Prisms, and Lenses: A Text-book of Geometrical Optics. The MacMillan Company, New York: 1993. pp. v, 618 and 619.

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