X-ray exposure apparatus

Details X-ray exposure apparatus X-ray exposure apparatus

1991-06-12

1992-11-17

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378205, 2504911, G21K 500

Patent

active

051649748

ABSTRACT:
An X-ray exposure apparatus wherein a member sensitive to X-ray is exposed to a pattern formed on a mask with the X-rays, includes an X-ray source for emitting X-rays, an irradiation chamber for accommodating the mask and the sensitive member and exposing them to the X-rays emitted by the X-ray source within the chamber and a vacuum pump for evacuating the chamber to effect the exposure operation in a vacuum.

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