X-ray exposure apparatus

Details X-ray exposure apparatus X-ray exposure apparatus

1992-09-15

1994-01-04

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378161, G21K 100

Patent

active

052767248

ABSTRACT:
Several ten thousands or several millions of juxtaposed hollow thin tubes, each having a diameter of, for example, 12 .mu.m and a length of 1 mm, are joined to each other to form a window having a predetermined open surface area. The window having a diameter of, for example, 30 mm, can withstand a differential pressure of several atm. A high-vacuum X-ray source and the window consisting of thin tubes having the aforementioned dimensions are connected through a differential evacuating device having a plurality of stages connected with a partitioning wall having an orifice of predetermined dimensions provided between the adjacent stages. The pressures at the two sides of the window are maintained to the atmospheric pressure and a pressure which is 1/10th of the atmospheric pressure, respectively. X-rays having a long wavelength of 10 .ANG. or above and emitted by a SOR device under a high vacuum can be illuminated on a sample provided in an environment at the atmospheric pressure at a high transmittance and over a wide area which cannot be achieved by a conventional Be window.

REFERENCES:
patent: 4484339 (1984-11-01), Mallozzi et al.

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