X-ray enhanced SEM critical dimension measurement

Details X-ray enhanced SEM critical dimension measurement X-ray enhanced SEM critical dimension measurement

1996-06-26

1998-08-25

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 37252

Patent

active

057985251

ABSTRACT:
Structures having high height to width ratios may be measured using X-ray techniques, where the surrounding base and the structure are composed of different substances. The technique combines X-ray detection with scanning electron microscope (SEM) beam scanning. The X-ray emission is set to detect the presence of a specific substance which is either in the structure or surrounding the structure.

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