X-Ray detector of semiconductor type

Details X-Ray detector of semiconductor type X-Ray detector of semiconductor type

1981-01-08

1983-05-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250370, 250396R, 378147, G01N 2300, G01T 122

Patent

active

043821839

ABSTRACT:
An X-ray detector of semiconductor type in which reflected electrons emitted from a sample are diverted to another direction by the action of a magnetic field provided across a passage for X-rays from a sample to an X-ray detecting element of semiconductor type, and an absorbent for absorbing reflected electrons is arranged ahead of the magnetic field in the path of the diverted reflected electrons, so as to prevent the reflected electrons from being incident on the X-ray detecting element, thereby improving the S/N ratio of the detecting element.

REFERENCES:
patent: 3471694 (1969-10-01), Poen
patent: 3614424 (1971-10-01), Openshaw

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