Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2009-06-29
2011-12-20
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S307000, C250S310000, C250S370150
Reexamination Certificate
active
08080791
ABSTRACT:
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
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Dona Pleun
Freitag Bert
von Harrach Hanno Sebastian
FEI Company
Griner David
Scheinberg Michael O.
Scheinberg & Griner LLP
Vanore David A
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