X-ray detecting devices and apparatus for analyzing a sample...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

Reexamination Certificate

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Details

C250S306000, C378S070000, C378S098800

Reexamination Certificate

active

11214116

ABSTRACT:
X-ray detecting devices and apparatus for analyzing a sample using the same are disclosed. A disclosed X-ray detecting device has an X-ray detector to detect X-rays emitted from a sample. The X-ray detector includes a collimator to collimate the X-rays, an electron trap to remove electrons included in the collimated X-rays, a window to transmit the X-rays and defining an interior space of the X-ray detector, a crystal to receive the X-rays which pass through the window and to generate a corresponding electric current, a field effect transistor to generate a signal in response to the electric current, and a vacuum pump to create a vacuum within the interior of the X-ray detector containing the field effect transistor and the crystal to suppress noise associated with at least one of the crystal and/or the field effect transistor.

REFERENCES:
patent: 5345491 (1994-09-01), Bolk et al.
patent: 5903004 (1999-05-01), Koshihara et al.
patent: 6479818 (2002-11-01), McCarthy et al.

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