X-ray alignment system for fabricating electronic chips

Details X-ray alignment system for fabricating electronic chips X-ray alignment system for fabricating electronic chips

2007-09-18

2007-09-18

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Accessory

Alignment

C378S034000

Reexamination Certificate

active

11124653

ABSTRACT:
A method of using x-rays to align screen printing of flip chip using x-ray sub-assembly in a chip fabricating assembly. X-rays are directed onto a substrate having receptor pads and a printing screen having fine apertures. The substrate is aligned with the printing screen based on the detection and analysis of the real-time image generated from the x-rays passing through the substrate and printing screen. The x-ray alignment system is capable of aligning gold plated receptor pads of five microns or less and disposed upon a low light contrast ceramic (e.g., 9011 alumina) substrate with a screen printing stencil having very small apertures of less than 125 microns.

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