Writing apparatus and writing method

Details Writing apparatus and writing method Writing apparatus and writing method

2011-07-12

2011-07-12

Nguyen, Kiet T (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492230

Reexamination Certificate

active

07977654

ABSTRACT:
A writing apparatus includes a writing unit configured to a write a pattern onto a target workpiece, based on a writing data of the pattern to be written on the target workpiece, and a generation unit configured generate, after the pattern has been written, writing data of a figure code indicating a writing information of when the target workpiece is written, based on the writing information, wherein the writing unit further writes the figure code onto the target workpiece, based on the writing data of the figure code.

REFERENCES:
patent: 6896186 (2005-05-01), Kudo
patent: 2009/0194710 (2009-08-01), Shibata
patent: 2001-92110 (2001-04-01), None
patent: 2007-233164 (2007-09-01), None
U.S. Appl. No. 12/343,997, filed Dec. 24, 2008, Hitoshi Sunaoshi.

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