Working method using scanning probe

Details Working method using scanning probe Working method using scanning probe

2006-03-04

2008-10-28

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S310000, C073S105000

Reexamination Certificate

active

07442925

ABSTRACT:
The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.

REFERENCES:
patent: 2005/0092907 (2005-05-01), West et al.
patent: 2008/0048115 (2008-02-01), Iyoki et al.

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